Vacuum systems chambers contain the vacuum at base pressures ranging over 10 orders of magnitude. The chambers physical characteristics are as varied as applications for which vacuum is used. They can be as small as a few millimeters in diameter or as large as a few meters in diameter. They can be as simple as a regular four-way cross or have hundreds of ports angled towards many internal focal points in many levels of the chamber.
Transferring Tunnel Transferring tunnel is used to transfer samples between UHV chambers, in a stable and easy-to-operate way. Transferring tunnel is used to transfer samples between UHV chambers, in a stable and easy-to-operate way. Up to 15 sample holders can be loaded and transferred via the dedicated sample holder trolley. The … Read More
Radial Distribution Chambers (UFO) The radial distribution chambers (UFO) are designed to transfer samples between multiple preparation and analysis chambers that are connected to it. The chambers are normally mounted at the centre of a series of chambers, acting as a central distribution hub for cluster tools. Features • Standard or telescopic transferring arm • By … Read More
Special Chambers Application Custom designed and fabricated UHV chambers and complete vacuum systems for a wide range of applications, including research/production prototype MBE, PLD, PVD magnetron sputtering & atomic and molecular physics/chemistry. Specification The choice of materials and the basic design of any vacuum chamber are as varied as the … Read More
Storage Chambers Application The storage chambers allow storage of up to 10 sample holders under UHV conditions. Specification Storage chambers are usually pumped via the distribution chamber pump set (independent pumping is also possible if requested) and may be equipped with options for cooling or heating. The heating and cooling … Read More
Preparation Chambers Application Preparation chambers provide versatile in-situ preparation facilities ranging from standard sample preparation techniques and thin film growth, sputtering and annealing, to advanced preparation techniques with in-situ characterisation. They typically have numerous UHV ports for the connection of various types of surface preparation techniques. Our standard versatile preparation … Read More
Load Lock Chambers Application Load lock chambers provide a fast and clean method of introducing samples into UHV systems. Specification Load locks may be positioned at various places on the UHV system, such as direct connection to the radial distribution chamber, linear transfer line or glovebox. Our standard range of … Read More
Infrared Chambers The infrared chamber is specifically designed for FTIR spectroscopy investigations. Application The infrared chamber is specifically designed for IR Spectroscopic investigations. It is equipped with a precision sample positioning mechanism, viewports and spare ports for future equipment. Specification The infrared chamber is equipped with potassium bromide glass ports … Read More
Linear Transfers Application The linear transfers are designed to transport sample holders/samples between chambers. They are commonly used to transfer samples from load lock chambers to system main chambers. Specification The linear transfers are pumped by the system vacuum pump set or else with a dedicated pump set. The entire … Read More
Static High Pressure Reactors Application The static high pressure reactors are designed to facilitate high pressure (up to 1 bar) experiments with various reaction gases. Specification Static high pressure reactors are equipped with a range of UHV ports of various standard sizes. They are designed typically for base pressures lower … Read More
Flow Through High Pressure Reactor The Flow Through High Pressure Reactor is designed to study reactions between gases and solid/powder samples under high pressure (beetwen reactor’s cups), in the reactor chamber under UHV conditions. Samples could be subject on static or flowing gas, with the heating up to 750°C and possibility of … Read More
Cleaver Chambers Application The cleaver chamber provides a UHV environment for cleaving crystal specimens. Specification The cleaver chamber mechanism is configured with easy to replace blades. Different sample sizes can be cleaved up to a maximum of 5×5 mm, H=12 mm. The chamber includes a linear positioning mechanism allowing the … Read More
Analytical Chambers Application Analytical chambers are designed for applications requiring the investigation of the chemical and physical properties of solid state surfaces, thin films and nanomaterials. They typically have numerous UHV ports for the connection of various types of analytical and spectroscopic instrumentation. Our standard versatile analytical chambers provide enough … Read More