Princeton Scientific Corp. offers Sputtering targets made of - Metals, non-metals and chemical compounds with purity from 99.9% to 99.9999%.
We offer standard, single element pure metals and custom compounds. Various geometric shapes; round, rectangular, as well as multi-tile and stepped constructions are possible.
Please review our standard and specialty target list for more information. Princeton Scientific can produce sputtering targets to your specific needs.
We will help to select appropriate target material, fabrication process, and bonding assembly that insures the success of your thin film deposition process.
Our Sputter targets are prepared either by a melt- or a powder metallurgical process.

We also provide an assorted array of backing plates for your systems requirements. Also, our bonding services include various metallic or silver epoxy techniques.

Backing Plates

Specialty Targets

Target Bonding

Material Formula Available Purities
     
Aluminum Al 99.9% - 99.9995%
Aluminum antimonide AlSb 99.99%
Aluminum boride AlB2 99.5%
Aluminum fluoride AlF3 99.9% - 99.99%
Aluminum nitride AlN 99.5%
Aluminum oxide Al2O3 99.9% - 99.99%
Aluminum phosphide AlP 99.95%
Aluminum oxynitride Al3NO3H2O 99.50%
     
Antimony Sb 99.99% - 99.999%
Antimony (III) sulfide Sb2S3 99.9% - 99.99%
Antimony oxide Sb2O3 99.9% - 99.99%
Antimony telluride Sb2Te3 99.99% - 99.999%
     
Arsenic As 99.9% - 99.9999%
Arsenic oxide As2O3 99.9%
Arsenic telluride As2Te3 99.99%
     
Barium strontium titanate BST 99.9% - 99.95%
Barium sulfide BaS 99.9%
Barium zirconate BaZr03 99.5%
Barium ferrite BaFe12O19 99.9%
Barium fluoride BaF2 99.9% - 99.99%
Barium oxide BaO 99.5% - 99.9%
Barium titanate BaTiO(3) 99.9% - 99.99%
     
Bismuth Bi 99.9% - 99.999%
Bismuth oxide Bi2O3 99.9% - 99.999%
Bismuth sulfide Bi2S3 99.9% - 99.99%
Bismuth telluride Bi2Te3 99.9% - 99.999%
Bismuth titanate Bi4Ti3O12 99.9% - 99.99%
     
Boron B 99% - 99.999%
Boron carbide B4C 99.5%
Boron nitride BN 99.5% - 99.9%
Boron oxide B2O3 99.9%
     
Cadmium Cd 99.9% - 99.99%
Cadmium arsenide Cd3As2 99.9% - 99.99%
Cadmium chloride CdCl2 99.9%
Cadmium fluoride CdF2 99.9% - 99.99%
Cadmium oxide CdO 99.9% - 99.99%
Cadmium selenide CdSe 99.9% - 99.999%
Cadmium stannate Cd2SnO4 99.9% - 99.99%
Cadmium sulfide CdS 99.9% - 99.999%
Cadmium telluride CdTe 99.9% - 99.999%
     
Calcium fluoride CaF2 99.9% - 99.99%
Calcium oxide CaO 99.95%
Calcium sulfide CaS 99.9% - 99.95%
Calcium titanate CaTiO3 99.9%
Calcium phosphate Ca3(PO4)2 99.90%
Calcium phosphate tribasic Ca10 (OH)2 (PO4)6 99.90%
     
Carbon C 99.9% - 99.999%
     
Cerium Ce 99.9% - 99.95%
Cerium fluoride CeF3 99.9% - 99.95%
Cerium oxide CeO2 99.5% - 99.95%
     
Cesium fluoride CsF 99.9% - 99.99%
Cesium iodide CsI 99.9% - 99.95%
     
Chromium Cr 99.5% - 99.999%
Chromium oxide CrO3 99.9%
Chromium boride CrB2 99.9%
Chromium carbide Cr3C2 99.9%
Chromium fluoride CrF3 99.9%
Chromium nitride Cr2N 99.9% - 99.99
Chromium oxide Cr2O3 99.9% - 99.95%
Chromium silicide CrSi2 99.9% - 99.95%
Chromium sulfide Cr2S3 99.9%
     
Cobalt Co 99.9% - 99.999%
Cobalt ferrite CoFe2O4 99.9%
Cobalt oxide CoO 99.9% - 99.95%
Cobalt oxide Co3O4 99.95%
Cobalt silicide CoSi2 99.5% - 99.95%
     
Copper Cu 99.9% - 99.9999%
Copper (II) sulfide CuS 99.9% - 99.95%
Copper oxide Cu2O 99.9% - 99.99%
Copper oxide CuO 99.9% - 99.99%
Copper phosphide Cu3P 99.9%
Copper selenide CuSe 99.9% - 99.99%
Copper sulfide Cu2S 99.9%
     
Dysprosium Dy 99.9% - 99.95%
Dysprosium fluoride DyF3 99.9% - 99.99%
Dysprosium oxide Dy2O3 99.9% - 99.99%
     
Erbium fluoride ErF3 99.9% - 99.95%
Erbium oxide Er2O3 99.9% - 99.99%
     
Europium Eu 99.9%
Europium oxide Eu2O3 99.9% - 99.99%
     
Gadolinium Gd 99.9%
Gadolinium fluoride Gd2F3 99.9%
Gadolinium gallium garnet Gd3Ga5O12 99.9%
     
Gallium Ga 99.99% - 99.9999%
Gallium antimonide GaSb 99.99% - 99.999%
Gallium arsenide GaAs 99.9% - 99.999%
Gallium nitride GaN 99.9% - 99.99%
Gallium oxide Ga2O3 99.9% - 99.99%
     
Germanium Ge 99.99% - 99.999%
Germanium nitride Ge3N4 99.9%
Germanium oxide GeO2 99.9% - 99.99%
Germanium selenide GeSe2 99.99%
Germanium sulfide GeS 99.99%
Germanium telluride GeTe 99.99% - 99.999%
     
Gold Au 99.9% - 99.999%
     
Hafnium Hf 99.5%
Hafnium (IV) fluoride HfF4 99.9%
Hafnium boride HfB2 99.5% - 99.9%
Hafnium carbide HfC 99.5%
Hafnium oxide HfO2 99.5% - 99.95%
     
Holmium Ho 99.9%
Holmium oxide Ho2O3 99.9% - 99.95%
     
Indium In 99.9% - 99.9999%
Indium telluride In2Te3 99.9% - 99.999%
Indium antimonide InSb 99.9% - 99.999%
Indium nitride InN 99.9% - 99.99%
Indium oxide In2O3 99.99% - 99.999%
Indium phosphide InP 99.99%
Indium selenide In2Se3 99.95% - 99.999%
Indium oxide/Tin oxide (ITO) In2O3/SnO2 99.99% - 99.999%
     
Iridium Ir 99.9% - 99.99%
Iridium oxide IrO2 99.9%
     
Iron Fe 99.9% - 99.99%
Iron boride FeB 99.5% - 99.99%
Iron carbide Fe3C 99.9%
Iron nickel oxide NiFe2O4 99.5% - 99.9%
Iron nitride FeN4 99.9%
Iron oxide Fe2O3 99.9% - 99.99%
Iron oxide Fe3O4 99.9% - 99.99%
Iron silicide FeSi2 99.9% - 99.99%
Iron disulfide FeS2 99.9% - 99.995%
     
Lanthanum La 99.9%
Lanthanum aluminate LaAlO3 99.5%
Lanthanum boride LaB6 99.5% - 99.9%
Lanthanum strontium manganate (La0.7Sr0.3)MnO3 99.9%
Lanthanum titanate LaTiO3 99.9%
     
Lead Pb 99.9% - 99.99%
Lead (II) oxide PbO 99.9% - 99.99%
Lead selenide PbSe 99.9% - 99.99%
Lead telluride PbTe 99.9% - 99.999%
Lead titanate PbTiO3 99.9% - 99.99%
     
Lithium carbonate Li2CO3 99.9%
Lithium cobalt oxide LiCoO2 99.9%
Lithium fluoride LiF 99.9% - 99.99%
Lithium manganese oxide LiMn2O4 99.9%
Lithium niobium oxide LiNbO3 99.9%
Lithium oxide Li2O 99.9%
Lithium peroxide Li2O2 99.9%
Lithium phosphate Li3PO4 99.9% - 99.99%
Lithium sulfate Li2SO4 99.9%
Lithium sulfide Li2S 99.9% - 99.99%
Lithium tetraborate Li3BO4 99.99%
Lithium titanate Li2TiO3 99.9%
     
Lutetium Lu 99.9% - 99.95%
Lutetium oxide Lu2O3 99.9% - 99.99%
     
Magnesium Mg 99.9% - 99.99%
Magnesium aluminate MgAl2O4 99.9%
Magnesium diboride MgB2 99.9%
Magnesium fluoride MgF2 99% - 99.99%
Magnesium oxide MgO 99.9% - 99.99%
Magnesium silicide Mg2Si 99.9%
Magnesium sulfide MgS 99.9%
     
Manganese Mn 99.9% - 99.95%
Manganese fluoride MnF2 99.9%
Manganese Nitride MnN4 99.9%
Manganese oxide MnO 99.9%
Manganese oxide MnO2 99.9%
Manganese oxide Mn2O3 99.9%
Manganese selenide MnSe 99.95%
Manganese sulfide MnS 99.9% - 99.95%
Manganese telluride MnTe 99.9% - 99.95%
     
Mercury selenide HgSe 99.99% - 99.999%
Mercury telluride HgTe 99.9% - 99.99%
     
Molybdenum Mo 99.9% - 99.99%
Molybdenum boride MoB 99.5%
Molybdenum carbide MO2C 99.9%
Molybdenum disulfide MoS2 99.5% - 99.9%
Molybdenum oxide MoO3 99.9%
Molybdenum oxide MoO2 99.9%
Molybdenum selenide MoSe2 99.9% - 99.99%
Molybdenum silicide MoSi2 99.9% - 99.99%
Molybdenum telluride MoTe2 99.9% - 99.99%
     
Neodymium Nd 99.9%
     
Nickel Ni 99.8% - 99.999%
Nickel boride Ni2B 99.5%
Nickel disilicide NiSi2 99.9%
Nickel oxide NiO 99% - 99.995%
Nickel telluride NiTe 99.9%
     
Niobium Nb 99.8% - 99.99%
Niobium carbide NbC 99.5%
Niobium oxide Nb2O5 99.9% - 99.999%
Niobium oxide NbO2 99.9% - 99.99%
Niobium selenide NbSe2 99.9%
     
Osmium Os 99.9% - 99.95%
     
Palladium Pd 99.9% - 99.995%
Palladium oxide PdO 99.9% - 99.95%
     
Phosphorus oxide P2O5 99.95%
     
Platinum Pt 99.9% - 99.999%
     
Praseodymium Pr 99.9%
     
Rhenium Re 99.9% - 99.99%
     
Rhodium Rh 99.9% - 99.99%
Rhodium oxide Rh2O3 99.9%
     
Ruthenium Ru 99.9% - 99.99%
Ruthenium oxide RuO2 99.9%
     
Samarium Sm 99.9%
Samarium fluoride SmF3 99.9% - 99.95%
Samarium oxide Sm2O3 99.9% - 99.99%
     
Scandium Sc 99.9% - 99.99%
Scandium oxide Sc2O3 99.9% - 99.99%
     
Selenium Se 99.9% - 99.9999%
Selenium oxide SeO2 99.9%
     
Silicon Si 99.9% - 99.999%
Silicon carbide SiC 99.5% - 99.9%
Silicon dioxide SiO2 99.9% - 99.999%
Silicon monoxide SiO 99.9% - 99.99%
Silicon nitride Si3N4 99.5% - 99.9%
Silicon sulfide SiS2 99.5% - 99.99%
     
Silver Ag 99.9% - 99.99%
Silver chloride AgCl 99.9%
Silver oxide Ag2O 99.9%
     
Sodium aluminum fluoride Na5Al3F14 99.5%
Sodium carbonate Na2CO3 99.9%
Sodium chloride NaCl 99.9%
Sodium fluoride NaF 99.9%
Sodium oxide Na2O2 99.9%
     
Strontium carbonate SrCO3 99.9%
Strontium fluoride SrF2 99.9%
Strontium molybdate SrMoO4 99.9%
Strontium oxide SrO 99.9%
Strontium ruthenate SrRuO3 99.9%
Strontium sulfide SrS 99.9%
Strontium titanate SrTiO3 99.9% - 99.95%
Strontium zirconate SrZrO3 99.9%
     
Sulfur S 99.9%
     
Tantalum Ta 99.9% - 99.99%
Tantalum carbide TaC 99.9%
Tantalum nitride TaN 99.5%
Tantalum pentoxide Ta2O5 99.9% - 99.99%
Tantalum selenide TaSe2 99.9%
Tantalum silicide TaSi2 99.5% - 99.9%
     
Tellurium Te 99.9% - 99.999%
Tellurium oxide TeO2 99.9% - 99.99%
     
Terbium Tb 99.9%
Terbium fluoride TbF3 99.9%
Terbium fluoride oxide TbOF 99.9%
Terbium oxide Tb4O7 99.9% - 99.95%
     
Tin Sn 99.9% - 99.999%
Tin (IV) fluoride SnF2 99.9%
Tin oxide SnO2 99.9% - 99.99%
Tin Sulfide SnS2 99.9%
Tin telluride SnTe 99.9% - 99.99%
     
Titanium Ti 99.9% - 99.999%
Titanium aluminide Ti3Al 99.90%
Titanium boride TiB2 99.50%
Titanium carbide TiC 99.9%
Titanium dioxide TiO2 99.9% - 99.999%
Titanium fluoride TiF3 99.90%
Titanium monoxide TiO 99.9% - 99.999%
Titanium nitride TiN 99.5% - 99.99%
Titanium oxide Ti2O3 99.900%
Titanium selenide TiSe2 99.9% - 99.99%
Titanium silicide TiSi2 99.5% - 99.95%
     
Tungsten W 99.9% - 99.999%
Tungsten carbide WC 99.5%
Tungsten oxide WO3 99.9% - 99.99%
Tungsten selenide WSe2 99.9%
Tungsten silicide WSi2 99.9% - 99.95%
Tungsten sulfide WS2 99.9%
Tungsten telluride WTe2 99.9% - 99.99%
     
Vanadium V 99.5% -99.9%
Vanadium carbide VC 99.5%
Vanadium dioxide VO2 99.9%
Vanadium nitride VN 99.9%
Vanadium oxide V2O3 99.9%
Vanadium pentoxide V2O5 99.9% - 99.99%
Vanadium selenide VSe2 99.9%
Vanadium sulfide V2S3 99.9%
     
Ytterbium Yb 99.9%
Ytterbium fluoride YbF3 99.95%
Ytterbium oxide Yb2O3 99.9% - 99.99%
     
Yttrium Y 99.9% - 99.99%
Yttrium aluminum oxide Y3Al5O12 99.9%
Yttrium ferrite Y3Fe5O12 99.9%
Yttrium fluoride YF3 99.9% - 99.99%
Yttrium oxide Y2O3 99.9% - 99.99%
     
Zinc Zn 99.9% - 99.999%
Zinc fluoride ZnF2 99.9% - 99.99%
Zinc nitride Zn3N2 99.9%
Zinc oxide ZnO 99.9% - 99.999%
Zinc phosphide Zn3P2 99.9%
Zinc selenide ZnSe 99.99% - 99.995
Zinc sulfide ZnS 99.9% - 99.99%
Zinc telluride ZnTe 99.99%
     
Zirconium Zr 99.5% - 99.9
Zirconium boride ZrB2 99.5%
Zirconium carbide ZrC 99.5%
Zirconium chloride ZrCl4 99.5%
Zirconium fluoride ZrF4 99.9%
Zirconium nitride ZrN 99.9%
Zirconium oxide ZrO2 99.5% - 99.9%
Zirconium silicide ZrSi2 99.9%
Zirconium oxide/Yttrium oxide (YSZ) ZrO2/Y2O3 99.90%
Metals
Aluminium Chromium Lead Platinum Tantalum
Antimony Cobalt Lithium Potassium Tellurium
Barium Gallium Magnesium Rhenium Tin
Beryllium Germanium Manganese Rhodium Titanium
Bismuth Gold Molybdenum Rubidium Tungsten
Boron Hafnium Niobium Ruthenium Vanadium
Cadmium Indium Nickel Selenium Zinc
Calcium Iridium Osmium Silicon Zirkonium
Carbon Iron Palladium Strontium
Rare Earth
Cerium Gadolinium Neodymium Terbium Various Rare
Dysprosium Holmium Praseodymium Thulium Earth alloys
Erbium Lutetium Samarium Ytterbium
Europium Lanthanum Scandium Yttrium
Alloys
Al/B Au/Pd Co/Ni Ge/Si Pt/Ru
Al/Cu Au/Pt Co/Ta/Zr Ge/Te Pt/Ag
Al/Cu/Si Au/Sn Cr/SiO2Cermet In/Sn Sb/In
Al/Cr Au/Zn Cu/Al Ir/Mn Sb/In/Sn
Al/Li Bi/Sb Cu/Cr Ni/Cr Si/Al
Al/Mg Bi/Sb/Se Cu/Ga Ni/Fe Si/Cr
Al/Si Bi/Sb/Se/Te Cu/Ni Ni/Ti Ta/Ti
Al/Ti Bi/Sb/Te Cu/Sn Ni/V Ti/Al
Au/Sb Bi/Se Fe/Al/Si Ni/Zr Ti/W
Au/Ag Bi/Te Fe/Cr Os/Ru Ti/Zr
Au/B Cd/Te Fe/Mn Pb/Se W/Ti
Au/Be So/Cr Fe/Ru/Ga/Si Pb/Te Zn/Al
Au/Ge Co/Fe Fe/Si Pb/Se/Te Zr/Y
Au/Ir Co/Nb/Zr Fe/Si/B/C Pd/Pt and others
Oxides
Al2O3 CuO PbZrO3 Supercond. Y2O3
Sb2O3 HfO2 unstab. LiNbO3 SrO ZnO
BaTiO3 HfO2/CaO MgO SrTiO3 ZnO dop.
Bi2O3 HfO2/Y2O3 MoO3 SrZrO3 ZrO2 unstab.
Bi2TiO5 In2O3 Nb2O3 Ta2O5 ZrO2/CaO
Bi4Ti3O12 ITO Nb2O5 ThO2 ZrO2/Y2O3
BiTiO3 LaAlO3 RE2O3 SnO2
CeO2 La2O3 SiO2 TiO2
CrO3 PbTiO3 SiO WO3 and others
Borides
CrB2 Mo2B6 TiB2 VB2
HfB2 NbB2 Wb ZrB2
LaB6 TaB2 W2B and others
Carbides
B4C Mo2C TaC WC6%Co ZrC
Cr3C2 NbC TiC WC12%Co
HfC SiC WC VC and others
Fluorides
AlF3 CeF3 LiF RE/NaF YF3
BaF2 LaF3 MgF2 Na3AlF6
CaF2 PbF2 KF ThF4 and others
Nitrides
AlN HfN Si3N4 TiN ZrN
BN NbN TaN VN and others
Silicides
CrSi2 MoSi2 TaSi2 Ti5Si3 V3Si
Cr3Si NbSi2 Ta5Si3 WSi2 ZrSi2
HfSi2 PtSi TiSi2 VSi2 and others
Sulfides, Selenides, Tellurides
As2S3 PbS NbSe2 TaTe2 ZnS
CdSe PbTe Nb-S WSe2 ZnTe
CdSe MoSe2 NbTe2 WsS2
CdTe MoS2 TaSe2 WTe2
PbSe MoTe2 TaS2 ZnSe and others