Sim. Verneuill grown
Materials properties | ||
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Structure formula: | LaAlO3 | |
State: | monocrystalline | |
Crystal structure: | rhombohedrial
cubic |
a = 5.377 Å a = 60.13°a = 3.821 Å |
Phase transition: | > 500° C | |
Density: | 6.51 g/cm3 | |
Melting point: | 2180°C | |
Coefficient of expansion: | 10 * 10-6/°C | |
Dielectrical constant (εr): | 20-25 |
Substrate properties | ||
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Production method: | sim. Verneuill grown (with minimum twins) | |
Orientation: | (100) | |
Orientation accuracy: | £ 0.5° | |
Standard size: | 10mm x 10mm x thickness 1mm or 0.5mm | |
Tolerance of length: | ± 0.10mm (typical better ± 0.05mm) | |
>Tolerance of thickness: | ± 0.05mm | |
Parallelness: | £ 0.02mm | |
Polishing: | standard: one side | |
Flatness: | ½ | |
Roughness of surface: | Rmax £ 15nm (average Ra = 3nm) | |
Scratches: | none | |
Surface quality: | with light microscope without defects |