| Materials properties | ||
|---|---|---|
| Structure formula: | MgO | |
| State: | Monocrystalline | |
| Crystal structure: | cCubic | |
| Lattice parameter: | 4.213 Å | |
| Density: | 3.58 g/cm3 | |
| Melting point: | 2800°C | |
| Thermal expansion coefficient: | 14.2 * 10-6/°C | |
| Dielectrical constant (εr): | 10 | |
| Substrate properties | ||
|---|---|---|
| Orientation: | (100) | |
| Orientation accuracy: | £ 0.5° | |
| Standard size: | 10mm x 10mm x thickness 1mm or 0.5mm | |
| Tolerance of length: | ± 0.10mm (typical better ± 0.05mm) | |
| Tolerance of thickness: | ± 0.05mm | |
| Parallelness: | £ 0.02mm | |
| Polishing: | Standard: one side | |
| Flatness: | ¼ | |
| Roughness of surface: | Rmax £ 5nm (average Ra = 1nm) | |
| Scratches: | none | |
| Surface quality: | With light microscope without defects | |