| Materials properties | ||
|---|---|---|
| Structure formula: | SrTiO3 | |
| State: | monocrystalline | |
| Crystal structure: | cubic | |
| Lattice parameter: | 3.905 Å | |
| Phase transition: | tetragonal <110K | |
| Density: | 5.12 g/cm3 | |
| Melting point: | 2080°C | |
| Coefficient of expansion: | 11.1 * 10-6/°C | |
| Dielectrical constant (εr): | 310 | |
| Substrate properties | ||
|---|---|---|
| Production method: | Verneuil grown (without twins) | |
| Orientation: | (100) | |
| Orientation accuracy: | £ 0.5° | |
| Standard size: | 10mm x 10mm x thickness 1mm or 0.5mm | |
| Tolerance of length: | ± 0.10mm (typical better ± 0.05mm) | |
| Tolerance of thickness: | ± 0.05mm | |
| Parallelness: | £ 0.02mm | |
| Polishing: | standard: one side | |
| Flatness: | ¼ | |
| Roughness of surface: | Rmax £ 3nm (average Ra=1nm) | |
| Scratches: | none | |
| Surface quality: | with light microscope without defects | |