| Materials properties | ||
|---|---|---|
| Structure formula: | ZrO2:Y(9.5% Y) | |
| State: | monocrystalline (twin free) | |
| Crystal structure: | cubic | a = 0.5125 nm |
| Melting point: | 2780°C | |
| Thermal expansion coefficient: | 8 * 10-6/°C | |
| Dielectrical constant (εr): | 27 | |
| Substrate properties | ||
|---|---|---|
| Production method: | Skull method | |
| Orientation: | (100) | |
| Orientation accuracy: | £0.5° | |
| Standard size: | 10mm x 10mm x thickness 0.5mm | |
| Tolerance of length: | +0 / -0.05mm | |
| Tolerance of thickness: | +0 / -0.02mm | |
| Parallelness: | £0.02° | |
| Polishing: | Standard: one side epi-polished | |
| Flatness: | £1µm / 10mm | |
| Roughness of surface: | Rmax £ 4nm (average Ra =< 1nm) | |
| Scratches: | none | |
| Surface quality: | with light microscope without defects | |