HPT-300 & HPT-500

The HPT-300 & HPT-500 are microprocessor controlled benchtop plasma treatment systems which are ideally suited to surface activation, cleaning and modification of a wide range of materials including polymers, metals, glass and ceramics.

Available in single or dual gas inlet versions and with onboard gas mixing manifold, the HPT-300/500 systems are able to handle a wide range of gases for optimised treatments, including air, oxygen, hydrogen, argon, nitrogen and many others.

An optional vapour delivery inlet extends the use to liquid precursors and a corrosion-resistant version expands the choice even further to address specific material treatments including;

  • Plasma cleaning
  • Plasma surface activation to improve adhesion
  • Functional plasma coatings
  • Plasma etching
  • PDMS & microfluidic devices
  • PEEK & other engineering polymers
  • PTFE
  • Metals
  • Ceramics
  • Glass & optical devices

TFT Color Touchscreen

Each system is supplied with a 5.7-inch colour touchscreen provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.

Plasma Cleaning Example

  • Material : PEEK
  • Oxygen plasma
  • 60 seconds

Before plasma treatment

After plasma treatment

Vacuum chamber & power

The HPT-300 system features a 200mm x 200mm (~12.5L) rectangular plasma process chamber in stainless steel with vacuum compatible materials throughout.

The HPT-500 feature a 240 x 240mm (~23L) rectangular plasma process chamber respectively. Both models feature removable parts/carrier trays which allow treatment of larger parts or many more smaller parts per batch.

Our proprietary, high stability HPS plasma generator is continuously variable over the entire 0-300W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.


The base model of each system has a single gas inlet and optional second gas or vapour delivery inlet. The units can be prepared so that either option can be added at a later time if required, ensuring that future requirements can be accommodated without expensive reconfiguration.

Repeatable and Reliable

With precision digital mass flow controllers and integrated pressure gauge, the HPT-300 & 500 models deliver unmatched reliability and repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves.


  • Compact benchtop units
  • User friendly
  • TFT interface
  • Recipe store
  • Fast treatment time
  • Precise
  • Repeatable
  • No hazardous emissions

Technical Specifications

 HPT-300 / HPT-500 Plasma Treatment Systems

HPT-300 –  W 533mm x H 466mm x L 615mm (+50mm on rear for cables)

HPT-500 – W 533mm x H 600mm x L 615mm (+50mm on rear for cables)


HPT-300 – ~40kg

HPT-500 – ~45kg

MaterialStainless Steel

HPT-300 – 200mm W x 200mm H x 320mm L

HPT-500 – 240mm W x 240mm H x 405mm L

Material optionsStainless steel
FormFlat tray
OptionsMulti-level shelf/electrode

HPT-300 – 190mm W x 310mm L, others to suit application

HPT-500 – 200mm W x 370mm L, others to suit application


HPT-300 – 0-250W, continuously variable output

HPT-500 – 0-300W, continuously variable output

Frequency40 kHz
Interface5.7” Colour TFT with recipe store
Gas channelsx1 MFC
Gas channel optionsx2 MFC or x1 MFC and x1 vapour inlet
Vent inletx1
Vent inlet optionssoft ventilation option
Connections6mm compression or 1/4″ compression
Process timer1sec – 99.59min
Recipe store
Stores up to 4 x recipes with individual parameters
Pressure gaugePirani sensor
Vacuum pump6 to 15 m3/hr pumping speed
Vacuum pump options2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections
Electrical90-250 VAC, 50-60Hz, 1200-1500 VA (including pump), fused 6.3 A T / 10 A T
Power cordSuited to region
ComplianceCE – UKCA – ROHS – WEEE

**Henniker strive for continuous improvement and specifications are subject to change without notice

HPT-300 Product Brochure

The HPT-300 is a microprocessor-controlled benchtop plasma treatment system which is capable of treating larger samples or more samples per cycle and includes many application specific configurations.

HPT-500 Product Brochure

The HPT-500 is a microprocessor-controlled benchtop plasma treatment system which is capable of treating larger samples or more samples per cycle and includes many application specific configurations.