TEM Plasma Cleaner

Our low-cost plasma cleaners/plasma ashers for TEM sample holders are designed specifically for fast and efficient cleaning.

The TEM sample plasma cleaners/plasma ashers are fully automated and come with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers. The plasma output power is fully variable over the range 0-100W, resulting in a very controllable & gentle cleaning process. Common sources of error inside the TEM are clearly reduced with plasma cleaning and the dwell time during the measurement is significantly increased.

TEM Plasma Cleaner /  Plasma Asher options:

The TEM plasma cleaner/plasma asher is an application-specific solution for low-pressure plasma cleaning and preparation of electron microscopy samples, including:

  • Low power operation
  • A front feed TEM sample holder
  • Multiple TEM grids and SEM stub cleaning
  • Re-entrant style sample holder introduction
  • Dual gas inlets for O2/Ar and other gases

TFT Colour touchscreen

Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.

Plasma Cleaning Method

HPT-100 Plasma Cleaner with JEOL TEM sample holder adapter. Continuously variable power output from 0-100W and dual digital MFC gas mixing. Samples were introduced via the front feedthrough adapter and cleaned with Ar:O2 95:5 mixture at low power (20W and 50W) in 30sec time steps.

Vacuum chamber, power and sample holders

The TEM system features either a 100mm or 150mm diameter plasma process chamber in stainless steel, borosilicate glass or quartz glass with vacuum compatible materials throughout. The application-specific TEM system is fully automated and can be supplied with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers. 

Our proprietary, high stability HPS plasma generator is continuously variable over the entire 0-100W/0-200W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.

Benefits

The plasma system is simple to use with a front panel touch interface providing interlocked pump down, process and vent cycles with a single keypress. Each system includes one adapter suitable for either Jeol or FEI instruments, others are available on application. A removable parts tray also allows cleaning of SEM sample stubs.

The TEM plasma cleaner/plasma asher is an application specific solution for low pressure plasma cleaning and preperation of electron microcopy samples including:

  • Low power operation
  • Front feed of TEM sample holder
  • Multiple TEM grids and SEM stub cleaning
  • Re-entrant style sample holder introduction
  • Dual gas inlets for O2/Ar and other gases

Technical Specifications


 HPT-100 / HPT-200 TEM Plasma Cleaners
ENCLOSURE
DimensionsHPT-100 / HPT-200 – W 520mm x H 286mm x L 550mm (+50mm on rear for cables)
Weight

HPT-100 – ~22kg

HPT-200 – ~23kg

CHAMBER
MaterialStainless Steel
FormCylindrical
Dimensions

HPT-100 – 100mm dia. x 280mm L

HPT-200 – 150mm dia. x 280mm L

REMOVABLE PARTS CARRIER
MaterialAluminium
Material optionsStainless steel
FormFlat tray
Form optionsPerforated tray, others to suit application
Dimensions

HPT-100 – 90mm W x 255mm L, others to suit application

HPT-200 – 135mm W x 255mm L, others to suit application

PLASMA POWER SUPPLY 
Power

HPT-100 – 0-100W, continuously variable output

HPT-200 – 0-200W, continuously variable output

Frequency40 kHz
PROCESS CONTROL
Interface5.7” Colour TFT with recipe store
Gas channelsx2 MFC
Gas channel options x1 vapour inlet
Vent inletx1
Vent inlet optionssoft ventilation option
Connections6mm compression or 1/4″ compression
Process timer1sec – 99.59min
Pressure gaugePirani sensor
Vacuum pump3 to 6 m3/hr pumping speed
Vacuum pump options2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections
Sample holder adapterIncludes one adapter suitable for either JEOL or FEI instruments, others on application
SERVICES
Electrical90-250 VAC, 50-60Hz, 1200-1500 VA (including pump), fused 6.3 A T / 10 A T
Power cordSuited to region
ComplianceCE – UKCA – ROHS – WEEE

**Henniker strive for continuous improvement and specifications are subject to change without notice

HPT-100 Product Brochure

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