2 Axis Deposition Manipulator
The 2 Axes Motorised MBE Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation. It is prepared to heat the substrate up to 1400°C with accuracy +/- 1°C. The station includes the substrate (sample holder) positioner and allows precise angular position of substrate in relation to linear shutter.
The 2 Axes Motorized MBE Manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is via resistive and EB methods. The Manipulator can work in the vertical orientation.
|Positional control Z||Handwheel|
|Positional control R1||Servomotor|
|Pressure range:||1 bar to 10-11mbar|
|Operating temperature||+5°C to +40°C|
|Standard base flange||DN 200CF|
|Sample temperature||‹ 1400ºC (±1ºC)|
|Z range||50 mm|
|Resolution (manual/motorised)||5 μm / 1 μm|
|R1 range||360° - continuous|
|Max speed||80 rpm|