4 Axis Manipulator
The 4 Axis Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, Z and R1 motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axis of the manipulator are operated manually by using a handwheel, micrometers or rotary feedthrough. The standard mounting flange is DN 100CF or DN 160CF and the standard travelling flange is DN 40CF (optionally DN 63CF). The 4 Axis Manipulator is a combination of XY Stage, Z Slide and Rotation Stage.
The 4 Axis Manipulators are used for manipulating sample holders and scientific tools with respect to a sample’s position. These manipulators, when combined with sample holders, allow precise placement and manipulation of samples in UHV environments. The manipulators themselves move the sample in three orthogonal axis, X, Y, and Z while the rotary drive provides rotation R1 around Z axis. They can work in any orientation.
The 4 Axis Manipulators are configured with a Sample Receiving Station that accepts one of our ‘PTS’ range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs. It can also be fully motorized in the same way as individual motorization of the XY Stages, Z Slides and Rotation Modules.
|Positional control X, Y||Micrometer|
|Positional control Z||Handwheel|
|Positional control R1||Rotary feedtdrough|
|Pressure range||1 bar to 10-11 mbar|
|Operating temperature||-25°C to +60°C|
|Standard base flange||DN 100CF or DN 160CF|
|Travelling flange||DN 40CF or DN 63CF|
|XY range||± 12.5 mm|
|Resolution (manual/motorised)||5 μm / 1 μm|
|Z range||75 ÷ 800 mm|
|Resolution (manual/motorised)||50 μm / standard 10 μm
(1 μm on request)
|R1 Range||± 180°|
|Resolution (manual)||0.5° / 0.1°|