Four Axis Manipulators

4 Axis Manipulator - Special Design


The 4 Axis Motorised Manipulator is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of X, Y, R3, and Z motions. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules.


The 4 Axis Motorized Manipulator is designed for precision positioning of sample holders under ultra high vacuum conditions. The maximum specified diameter of any object passing through the manipulator’s bellows is 30mm, in order to maintain an X-Y movement of 12.5mm during rotational motions. Operation with objects of greater than 30mm diameter is possible with reduced X- Y travel but please consult the factory in order to prevent possible damage. These manipulators are configured with an inclinometer as standard.

Technical Data

Positional control X Stepper motor
Positional control Y Stepper motor
Positional control Z Stepper motor
Positional control R3 Stepper motor
Operating temperature -20°C to +60°C
Bakeout temperature 150°C
Standard base flange DN 160CF
Travelling flange DN 100CF
XY range ± 12.5 mm
Resolution (manual/motorised) 5 μm / 1 μm
Z range 50 mm
Resolution (manual/motorised) 1 mm / standard 10 μm
(1 μm on request)
R1 Range ± 180°
Resolution (manual/motorised) 0.1° / 0.1°
Electrical specification of the inclinometer
Supply voltage 5V (3.4 - 6.0V)
Current consumption 24 mA
Angle relative accuracy ± 0.1°