Ion Source IS 40C1

The Ion Source IS 40C1 is a compact, easy-to-use extractor type ion gun for sample surface cleaning. The source generates an ion current of >70 μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (between 62.5 mm - 384.5 mm, other on request).


  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • High Ion Beam Current
  • Long lifetime
  • High stability


  • Gas dosing system
  • Customised insertion length
  • Linear shift

Technical Data

Mounting flange DN 40CF  (non-rotatable)
Energy range 0.12 keV – 5 keV
Current density > 120 μA/cm2 (for distance 30 mm)
Cathode type yttrium oxide coated iridium filament
Insertion length min. 62.5 mm, other on request
OD: max. 37 mm
FWHM dependent on ion energy and working distance
(e.g. 3 mm for distance 30 mm)
Typical working distance 30 - 250 mm
Bakeout temperature up to 250°C
Working pressure 10-5 - 10-6 mbar


Related Product:

Ion Source Power Supply IS40-PS
The IS40-PS is a high stability & low noise power supply, which can be configured to work with IS40C1 or IS40E1 Ion source.

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