4-5 Axis Universal Manipulators

The 4-5* axis manipulator with X, Y, Z, R1, R2 axes motorised is a high precision, high rigidity, UHV specimen manipulator of modular construction.

The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorized by stepper motors or servomotors. The X, Y and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.

Option

▪ Full motorization
▪ Full software control
▪ Temperature stabilization
▪ Heating option: direct, resistive or EB
▪ Heaters suitable for reactive gases (resistive heating)

Additional information

The multi-axis manipulators are configured with a sample receiving station that can accept one of the PTS range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000V, 2 x heating current up to 20A) and sapphire ball cooling contact for liquid nitrogen cooling. The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.* 6 axes manipulator for PTS sample holders on request.

Technical Data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LN2
XY range ± 12.5 mm
   positional control micrometer/motorised*
   resolution (manual/motorised) 5 μm / 1 μm
Z range 75 - 800 mm (other on request)
   positional control handwheel/motorised*
   resolution (manual/motorised) 500 μm / standard 10 μm
(1 μm on request)
R1 range ± 175°
   positional control rotary feedthrough/motorised*
   resolution (motorised) 0.1°
R2 range 360° continuous / ±90°
   positional control motorised
   resolution (motorised) 0.1°
Bakeout temperature up to 150 °C

 

* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.

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