The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. All axes of the manipulator are motorized by stepper motors or servomotors. The X, Y and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.
▪ Full motorization
▪ Full software control
▪ Temperature stabilization
▪ Heating option: direct, resistive or EB
▪ Heaters suitable for reactive gases (resistive heating)
|Standard base flange||DN 100CF or DN 160CF|
|Pressure range||down to 10-11 mbar|
|Heating methods||resistive, EB, direct|
|XY range||± 12.5 mm|
|resolution (manual/motorised)||5 μm / 1 μm|
|Z range||75 - 800 mm (other on request)
|resolution (manual/motorised)||500 μm / standard 10 μm
(1 μm on request)
|R1 range||± 175°
|positional control||rotary feedthrough/motorised*|
|R2 range||360° continuous / ±90°
|Bakeout temperature||up to 150 °C|
* stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.