4-6 Axis Helium Manipulators (Closed Cycle)
The manipulator with helium cryostat is a versatile, closed cycle system that has many applications in ultra high vacuum research.
The manipulator can be configured with Z slide, XY stage or differentially pumped rotary feedthrough. The modular construction means that the specification can be upgraded or modified by the addition or replacement of well defined modules. The standard mounting flange is DN 100CF. The system typically includes a compressor, high pressure hoses, expander, temperature controller, heater and sensor.
Option
▪ Full motorization
▪ Full software control
▪ Helium recovery system
▪ Possibility to mount an angular device for PES calibration
▪ Additional electrical contacts for silicon sample direct heating
▪ Low vibration cryostat
▪ Temperature stabilization
▪ Heating option: direct, resistive or EB
Heating and cooling methods
▪ EB heating - up to 1000 °C (second stage)
▪ Direct heating with 10 A
▪ Resistive heating (on request)
▪ Liquid helium cooling:
- below 10 K* (5-axis manipulator)
* parameters achieved without stabilization and without heating option.
Technical Data
| Standard base flange | DN 100CF or DN 160CF |
| Pressure range | 1 bar to 10-11 mbar |
| Heating methods | resistive, EB, direct |
| Cooling method | LHe |
| XY range | ± 12.5 mm* |
| positional control | micrometer/motorised** |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Z range | up to 300 mm |
| positional control | handwheel/motorised** |
| resolution (manual/motorised) | 50 μm / standard 10 μm (1 μm on request) |
| R1 range | ± 180° |
| positional control | rotary feedthrough/motorised** |
| resolution (motorised) | 0.1° |
| R2 range | 360° continuous |
| positional control | motorised** |
| resolution (motorised) | 0.1° |
| R3 range | - 20° to +40° |
| positional control | rotary feedthrough/motorised** |
| resolution (motorised) | 0.1° |
| Bakeout temperature | up to 150 °C |
* for base flange DN 160CF
** stepper motor or servomotor - depend on application.
Manipulator can be prepared for customer motors or drivers - on request.
