XYZ Mini Manipulators
The XYZ mini manipulator is a high precision UHV specimen translator having X, Y and Z motions.
The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.
Application
The XYZ mini manipulator has been designed for ease and convenience of use. X and Y movement is ± 12.5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.
Additional information
Only the Z movement can be motorized.
Technical Data
| Base flange | DN 63CF or DN 100CF |
| Travelling flange | DN 40CF |
| XY range | ± 12.5 mm |
| resolution | 5 μm |
| Z range | 75 - 100 mm |
| resolution (manual) | 0.5 mm |
| Bakeout temperature | up to 150 °C |
Compressed / Extended Length
| Compressed length [mm]
Extended length [mm] |
|||
| Z range [mm] | DN 40/40CF bellow ID39 |
DN63/40CF bellow ID39 |
DN100/40CF bellow ID39 |
| 75 | 179 254 |
179 254 |
179 254 |
| 100 | - | 179.5 279.5 |
179.5 279.5 |
