XYZ Mini Manipulators

The XYZ mini manipulator is a high precision UHV specimen translator having X, Y and Z motions.

The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.

Application

The XYZ mini manipulator has been designed for ease and convenience of use. X and Y movement is ± 12.5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.

Additional information

Only the Z movement can be motorized.

Technical Data

Base flange DN 63CF or DN 100CF
Travelling flange DN 40CF
XY range ± 12.5 mm
   resolution 5 μm
Z range 75 - 100 mm
   resolution (manual) 0.5 mm
Bakeout temperature up to 150 °C

 

Compressed / Extended Length

Compressed length [mm]

Extended length [mm]

Z range [mm] DN 40/40CF
bellow ID39
DN63/40CF
bellow ID39
DN100/40CF
bellow ID39
75 179
254
179
254
179
254
100 - 179.5
279.5
179.5
279.5

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