Differently Pumped Rotary Feedthrough

The differentially pumped rotary feedthrough provides 360° of continuous rotary freedom through the vacuum wall of a UHV system.

The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on special sealing surfaces. A pre-loaded ball bearing set accurately controls the rotating stage position.


The differentially pumped rotary feedthrough can be combined with manipulators and any other precision positioning devices.

Additional information

The feedthroughs are equipped with worm drive providing fine angle adjustment. They are available with an anti-backlash stepper motor.
Different motors or motor control systems available (stepper motors, servomotors, IcePAP).

Technical Data

Base flange DN 40CF, DN 63CF, DN 100CF, DN 160CF
R1 rotation control handwheel / stepper motor (option)
Resolution (manual/motorised/external optical encoder) 1° / 0.1° / 0.05°
Bakeout temperature up to 150 °C



Base flange ID [mm] distance L [mm]
DN 40CF 41 35.2
DN 63CF 66 48
DN 100CF 103 47
DN160CF 153.1 44

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