The differentially pumped rotary feedthrough provides 360° of continuous rotary freedom through the vacuum wall of a UHV system.
The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on special sealing surfaces. A pre-loaded ball bearing set accurately controls the rotating stage position.
The differentially pumped rotary feedthrough can be combined with manipulators and any other precision positioning devices.
The feedthroughs are equipped with worm drive providing fine angle adjustment. They are available with an anti-backlash stepper motor.
Different motors or motor control systems available (stepper motors, servomotors, IcePAP).
|Base flange||DN 40CF, DN 63CF, DN 100CF, DN 160CF|
|R1 rotation control||handwheel / stepper motor (option)|
|Resolution (manual/motorised/external optical encoder)||1° / 0.1° / 0.05°|
|Bakeout temperature||up to 150 °C|
DIAMETER & DISTANCE BETWEEN FLANGES
|Base flange||ID [mm]||distance L [mm]|