XY Stages

The XY stage is a precision, high rigidity UHV specimen translator having X and Y motions.

The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any orientation.


The XY stages has been designed for ease and convenience of use. X and Y movement are ± 25.0 mm, depending on the accessories that are fitted. They can also be used to reposition a chamber port with an axis that is parallel to, but slightly off, the desired direction. In this last usage it is sometimes referred to as an XY adjuster and is a very economical alternative to other devices.

Technical Data

Base flange DN 100CF or DN 160CF
Travelling flange DN 63CF or DN 100CF
Max free diameter 102 mm
X, Y range ± 12.5 mm or ± 25 mm
   positional control micrometer / stepper motor (option)
   resolution (manual/motorised) 5 μm / 1 μm
Bakeout temperature up to 150 °C


Maximum XY Ranges

Base flange Travelling flange Ø B [mm] X,Y range [mm] real stroke (circle) X,Y range [mm] real stroke (square)
DN 100CF DN 63CF Ø 38 ± 25 ± 17.5
DN 100CF DN 100CF Ø 62 ± 12.5 ± 9
DN 160CF DN 63CF Ø 38 ± 25 ± 17.5
DN 160CF DN 100CF Ø 75 ± 25 ± 17.5


XY Stage DN 160/100CF ranges (example)

(ØA-ØB)/2 = real stroke (circle) Ø B [mm]
Ø 50 Ø 80 Ø 100
DN 160/100CF XY ± 12.5 mm
mounting flange bore ØA=125 mm
± 12.5 ± 12.5 ± 12.5
DN 160/100CF XY ± 25.0 mm
mounting flange bore ØA=125 mm
± 25 ± 22.5 ± 12.5
DN 160/100CF XY ± 25.0 mm
mounting flange bore ØA=152 mm
± 25 ± 25 ± 25


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