The PTS QUARTZ sample holder is equipped with integrated quartz balance for deposition rate measurements. A key advantage is that all evaporators may be calibrated with the same quartz crystal. Additionally, the sample holder can measure rates in multiple chambers on multi-chamber UHV systems, removing the expense of having to mount separate quartz balances and Z translators on each chamber. It is compatible with the standard PTS receiving stations.
- Configured with oscillator contacts and necessary controller.
- Compatible with all third party deposition rate monitor controllers.