Measurement Controllers

Thickness Monitors Controller TMC-13

Description

TMC13 is the newest technology electronics designed for monitoring and controlling any coating and deposition processes. Up to six channel inputs and two additional vacuum gauge channels together with 7" TFT display makes this unit really unique and universal. Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration.

Features

  • Six channels for quartz balance
  • 7" TFT touch panel display
  • intuitive & multilanguage interface
  • compact design
  • two inputs for most active vacuum gauges
  • up to 8 shutters and I/O reprogrammable
  • relay outputs
  • two reprogrammable analog outputs for rate and thickness monitoring with 16 bits resolution
  • communication interfaces: RS232/485, Ethernet
  • industry standard 6 MHz Crystal
  • frequency resolution: 0.1 Hz (for TM13) or 0.01 Hz (for TM14)
  • Rapid SE and LabVIEW libraries
  • operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
  • 2D real time chart module (option)
  • one-touch material change
  • favourites list for frequently used materials
  • one-touch units change
  • save individual user profile
  • built-in video tutorials

Technical Data

Supply voltage 100-240 VAC, 50/60 Hz (power consumption max 100 W)
TM sensor inputs  6
Thickness 0 - 9999000 Å
Rate 0 - 9999 Å/s
Frequency resolution 0.1 Hz (for TM13), 0.01 Hz (for TM14)
Frequency Range 2-6 MHz
Thickness Resolution 0.1 Å (for TM13), 0.01 Å (for TM14)
Rate Resolution 0.1 Å/s (for TM13), 0.01 Å/s (for TM14)
Tooling Factor 1 - 400%
Measurement units Å, kÅ, nm
Measurement period 100 ms - 2 s (depends on TM type)
Shutter control manual, time, thickness
Shutter Time 1 - 1000000 s
Pressure channels inputs 2
Compatible sensors
(two channels)
CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251, PCR280, ATMION
Measurement units mbar, Pa, Torr, Psia
Degas Time 1 - 3 min
Output ▪ 8 relay outputs (2 outputs with COM NC and NO contacts)
▪ 2 analog outputs: 0-10V (retransmision thickness, rate, pressure)
Inputs 4 digital inputs (in 24V logic)
User interface 7″ TFT display with touchscreen
Communication Interface RS232/485, Ethernet
Communication protocol MODBUS-TCP
Dimensions 212.6 x 128.4 x 260.9 mm (W x H x D)
Weight (approx.) 3 kg

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