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Backing Plates, Specialty Targets, & Target Bonding
Princeton Scientific Corp. offers Sputtering targets made of – Metals, non-metals and chemical compounds with purity from 99.9% to 99.9999%.
We offer standard, single element pure metals and custom compounds. Various geometric shapes; round, rectangular, as well as multi-tile and stepped constructions are possible.
Please review our standard and specialty target list for more information. Princeton Scientific can produce sputtering targets to your specific needs.
We will help to select appropriate target material, fabrication process, and bonding assembly that insures the success of your thin film deposition process.
Our Sputter targets are prepared either by a melt- or a powder metallurgical process.
We also provide an assorted array of backing plates for your systems requirements. Also, our bonding services include various metallic or silver epoxy techniques.
| Material | Formula | Available Purities |
|---|---|---|
| Aluminum | Al | 99.9% - 99.9995% |
| Aluminum antimonide | AlSb | 99.99% |
| Aluminum boride | AlB2 | 99.5% |
| Aluminum fluoride | AlF3 | 99.9% - 99.99% |
| Aluminum nitride | AlN | 99.5% |
| Aluminum oxide | Al2O3 | 99.9% - 99.99% |
| Aluminum phosphide | AlP | 99.95% |
| Aluminum oxynitride | Al3NO3H2O | 99.50% |
| Antimony | Sb | 99.99% - 99.999% |
| Antimony (III) sulfide | Sb2S3 | 99.9% - 99.99% |
| Antimony oxide | Sb2O3 | 99.9% - 99.99% |
| Antimony telluride | Sb2Te3 | 99.99% - 99.999% |
| Arsenic | As | 99.9% - 99.9999% |
| Arsenic oxide | As2O3 | 99.9% |
| Arsenic telluride | As2Te3 | 99.99% |
| Barium strontium titanate | BST | 99.9% - 99.95% |
| Barium sulfide | BaS | 99.9% |
| Barium zirconate | BaZr03 | 99.5% |
| Barium ferrite | BaFe12O19 | 99.9% |
| Barium fluoride | BaF2 | 99.9% - 99.99% |
| Barium oxide | BaO | 99.5% - 99.9% |
| Barium titanate | BaTiO(3) | 99.9% - 99.99% |
| Bismuth | Bi | 99.9% - 99.999% |
| Bismuth oxide | Bi2O3 | 99.9% - 99.999% |
| Bismuth sulfide | Bi2S3 | 99.9% - 99.99% |
| Bismuth telluride | Bi2Te3 | 99.9% - 99.999% |
| Bismuth titanate | Bi4Ti3O12 | 99.9% - 99.99% |
| Boron | B | 99% - 99.999% |
| Boron carbide | B4C | 99.5% |
| Boron nitride | BN | 99.5% - 99.9% |
| Boron oxide | B2O3 | 99.9% |
| Cadmium | Cd | 99.9% - 99.99% |
| Cadmium arsenide | Cd3As2 | 99.9% - 99.99% |
| Cadmium chloride | CdCl2 | 99.9% |
| Cadmium fluoride | CdF2 | 99.9% - 99.99% |
| Cadmium oxide | CdO | 99.9% - 99.99% |
| Cadmium selenide | CdSe | 99.9% - 99.999% |
| Cadmium stannate | Cd2SnO4 | 99.9% - 99.99% |
| Cadmium sulfide | CdS | 99.9% - 99.999% |
| Cadmium telluride | CdTe | 99.9% - 99.999% |
| Calcium fluoride | CaF2 | 99.9% - 99.99% |
| Calcium oxide | CaO | 99.95% |
| Calcium sulfide | CaS | 99.9% - 99.95% |
| Calcium titanate | CaTiO3 | 99.9% |
| Calcium phosphate | Ca3(PO4)2 | 99.90% |
| Calcium phosphate tribasic | Ca10 (OH)2 (PO4)6 | 99.90% |
| Carbon | C | 99.9% - 99.999% |
| Cerium | Ce | 99.9% - 99.95% |
| Cerium fluoride | CeF3 | 99.9% - 99.95% |
| Cerium oxide | CeO2 | 99.5% - 99.95% |
| Cesium fluoride | CsF | 99.9% - 99.99% |
| Cesium iodide | CsI | 99.9% - 99.95% |
| Chromium | Cr | 99.5% - 99.999% |
| Chromium oxide | CrO3 | 99.9% |
| Chromium boride | CrB2 | 99.9% |
| Chromium carbide | Cr3C2 | 99.9% |
| Chromium fluoride | CrF3 | 99.9% |
| Chromium nitride | Cr2N | 99.9% - 99.99 |
| Chromium oxide | Cr2O3 | 99.9% - 99.95% |
| Chromium silicide | CrSi2 | 99.9% - 99.95% |
| Chromium sulfide | Cr2S3 | 99.9% |
| Cobalt | Co | 99.9% - 99.999% |
| Cobalt ferrite | CoFe2O4 | 99.9% |
| Cobalt oxide | CoO | 99.9% - 99.95% |
| Cobalt oxide | Co3O4 | 99.95% |
| Cobalt silicide | CoSi2 | 99.5% - 99.95% |
| Copper | Cu | 99.9% - 99.9999% |
| Copper (II) sulfide | CuS | 99.9% - 99.95% |
| Copper oxide | Cu2O | 99.9% - 99.99% |
| Copper oxide | CuO | 99.9% - 99.99% |
| Copper phosphide | Cu3P | 99.9% |
| Copper selenide | CuSe | 99.9% - 99.99% |
| Copper sulfide | Cu2S | 99.9% |
| Dysprosium | Dy | 99.9% - 99.95% |
| Dysprosium fluoride | DyF3 | 99.9% - 99.99% |
| Dysprosium oxide | Dy2O3 | 99.9% - 99.99% |
| Erbium fluoride | ErF3 | 99.9% - 99.95% |
| Erbium oxide | Er2O3 | 99.9% - 99.99% |
| Europium | Eu | 99.9% |
| Europium oxide | Eu2O3 | 99.9% - 99.99% |
| Gadolinium | Gd | 99.9% |
| Gadolinium fluoride | Gd2F3 | 99.9% |
| Gadolinium gallium garnet | Gd3Ga5O12 | 99.9% |
| Gallium | Ga | 99.99% - 99.9999% |
| Gallium antimonide | GaSb | 99.99% - 99.999% |
| Gallium arsenide | GaAs | 99.9% - 99.999% |
| Gallium nitride | GaN | 99.9% - 99.99% |
| Gallium oxide | Ga2O3 | 99.9% - 99.99% |
| Germanium | Ge | 99.99% - 99.999% |
| Germanium nitride | Ge3N4 | 99.9% |
| Germanium oxide | GeO2 | 99.9% - 99.99% |
| Germanium selenide | GeSe2 | 99.99% |
| Germanium sulfide | GeS | 99.99% |
| Germanium telluride | GeTe | 99.99% - 99.999% |
| Gold | Au | 99.9% - 99.999% |
| Hafnium | Hf | 99.5% |
| Hafnium (IV) fluoride | HfF4 | 99.9% |
| Hafnium boride | HfB2 | 99.5% - 99.9% |
| Hafnium carbide | HfC | 99.5% |
| Hafnium oxide | HfO2 | 99.5% - 99.95% |
| Holmium | Ho | 99.9% |
| Holmium oxide | Ho2O3 | 99.9% - 99.95% |
| Indium | In | 99.9% - 99.9999% |
| Indium telluride | In2Te3 | 99.9% - 99.999% |
| Indium antimonide | InSb | 99.9% - 99.999% |
| Indium nitride | InN | 99.9% - 99.99% |
| Indium oxide | In2O3 | 99.99% - 99.999% |
| Indium phosphide | InP | 99.99% |
| Indium selenide | In2Se3 | 99.95% - 99.999% |
| Indium oxide/Tin oxide (ITO) | In2O3/SnO2 | 99.99% - 99.999% |
| Iridium | Ir | 99.9% - 99.99% |
| Iridium oxide | IrO2 | 99.9% |
| Iron | Fe | 99.9% - 99.99% |
| Iron boride | FeB | 99.5% - 99.99% |
| Iron carbide | Fe3C | 99.9% |
| Iron nickel oxide | NiFe2O4 | 99.5% - 99.9% |
| Iron nitride | FeN4 | 99.9% |
| Iron oxide | Fe2O3 | 99.9% - 99.99% |
| Iron oxide | Fe3O4 | 99.9% - 99.99% |
| Iron silicide | FeSi2 | 99.9% - 99.99% |
| Iron disulfide | FeS2 | 99.9% - 99.995% |
| Lanthanum | La | 99.9% |
| Lanthanum aluminate | LaAlO3 | 99.5% |
| Lanthanum boride | LaB6 | 99.5% - 99.9% |
| Lanthanum strontium manganate | (La0.7Sr0.3)MnO3 | 99.9% |
| Lanthanum titanate | LaTiO3 | 99.9% |
| Lead | Pb | 99.9% - 99.99% |
| Lead (II) oxide | PbO | 99.9% - 99.99% |
| Lead selenide | PbSe | 99.9% - 99.99% |
| Lead telluride | PbTe | 99.9% - 99.999% |
| Lead titanate | PbTiO3 | 99.9% - 99.99% |
| Lithium carbonate | Li2CO3 | 99.9% |
| Lithium cobalt oxide | LiCoO2 | 99.9% |
| Lithium fluoride | LiF | 99.9% - 99.99% |
| Lithium manganese oxide | LiMn2O4 | 99.9% |
| Lithium niobium oxide | LiNbO3 | 99.9% |
| Lithium oxide | Li2O | 99.9% |
| Lithium peroxide | Li2O2 | 99.9% |
| Lithium phosphate | Li3PO4 | 99.9% - 99.99% |
| Lithium sulfate | Li2SO4 | 99.9% |
| Lithium sulfide | Li2S | 99.9% - 99.99% |
| Lithium tetraborate | Li3BO4 | 99.99% |
| Lithium titanate | Li2TiO3 | 99.9% |
| Lutetium | Lu | 99.9% - 99.95% |
| Lutetium oxide | Lu2O3 | 99.9% - 99.99% |
| Magnesium | Mg | 99.9% - 99.99% |
| Magnesium aluminate | MgAl2O4 | 99.9% |
| Magnesium diboride | MgB2 | 99.9% |
| Magnesium fluoride | MgF2 | 99% - 99.99% |
| Magnesium oxide | MgO | 99.9% - 99.99% |
| Magnesium silicide | Mg2Si | 99.9% |
| Magnesium sulfide | MgS | 99.9% |
| Manganese | Mn | 99.9% - 99.95% |
| Manganese fluoride | MnF2 | 99.9% |
| Manganese Nitride | MnN4 | 99.9% |
| Manganese oxide | MnO | 99.9% |
| Manganese oxide | MnO2 | 99.9% |
| Manganese oxide | Mn2O3 | 99.9% |
| Manganese selenide | MnSe | 99.95% |
| Manganese sulfide | MnS | 99.9% - 99.95% |
| Manganese telluride | MnTe | 99.9% - 99.95% |
| Mercury selenide | HgSe | 99.99% - 99.999% |
| Mercury telluride | HgTe | 99.9% - 99.99% |
| Molybdenum | Mo | 99.9% - 99.99% |
| Molybdenum boride | MoB | 99.5% |
| Molybdenum carbide | MO2C | 99.9% |
| Molybdenum disulfide | MoS2 | 99.5% - 99.9% |
| Molybdenum oxide | MoO3 | 99.9% |
| Molybdenum oxide | MoO2 | 99.9% |
| Molybdenum selenide | MoSe2 | 99.9% - 99.99% |
| Molybdenum silicide | MoSi2 | 99.9% - 99.99% |
| Molybdenum telluride | MoTe2 | 99.9% - 99.99% |
| Neodymium | Nd | 99.9% |
| Nickel | Ni | 99.8% - 99.999% |
| Nickel boride | Ni2B | 99.5% |
| Nickel disilicide | NiSi2 | 99.9% |
| Nickel oxide | NiO | 99% - 99.995% |
| Nickel telluride | NiTe | 99.9% |
| Niobium | Nb | 99.8% - 99.99% |
| Niobium carbide | NbC | 99.5% |
| Niobium oxide | Nb2O5 | 99.9% - 99.999% |
| Niobium oxide | NbO2 | 99.9% - 99.99% |
| Niobium selenide | NbSe2 | 99.9% |
| Osmium | Os | 99.9% - 99.95% |
| Palladium | Pd | 99.9% - 99.995% |
| Palladium oxide | PdO | 99.9% - 99.95% |
| Phosphorus oxide | P2O5 | 99.95% |
| Platinum | Pt | 99.9% - 99.999% |
| Praseodymium | Pr | 99.9% |
| Rhenium | Re | 99.9% - 99.99% |
| Rhodium | Rh | 99.9% - 99.99% |
| Rhodium oxide | Rh2O3 | 99.9% |
| Ruthenium | Ru | 99.9% - 99.99% |
| Ruthenium oxide | RuO2 | 99.9% |
| Samarium | Sm | 99.9% |
| Samarium fluoride | SmF3 | 99.9% - 99.95% |
| Samarium oxide | Sm2O3 | 99.9% - 99.99% |
| Scandium | Sc | 99.9% - 99.99% |
| Scandium oxide | Sc2O3 | 99.9% - 99.99% |
| Selenium | Se | 99.9% - 99.9999% |
| Selenium oxide | SeO2 | 99.9% |
| Silicon | Si | 99.9% - 99.999% |
| Silicon carbide | SiC | 99.5% - 99.9% |
| Silicon dioxide | SiO2 | 99.9% - 99.999% |
| Silicon monoxide | SiO | 99.9% - 99.99% |
| Silicon nitride | Si3N4 | 99.5% - 99.9% |
| Silicon sulfide | SiS2 | 99.5% - 99.99% |
| Silver | Ag | 99.9% - 99.99% |
| Silver chloride | AgCl | 99.9% |
| Silver oxide | Ag2O | 99.9% |
| Sodium aluminum fluoride | Na5Al3F14 | 99.5% |
| Sodium carbonate | Na2CO3 | 99.9% |
| Sodium chloride | NaCl | 99.9% |
| Sodium fluoride | NaF | 99.9% |
| Sodium oxide | Na2O2 | 99.9% |
| Strontium carbonate | SrCO3 | 99.9% |
| Strontium fluoride | SrF2 | 99.9% |
| Strontium molybdate | SrMoO4 | 99.9% |
| Strontium oxide | SrO | 99.9% |
| Strontium ruthenate | SrRuO3 | 99.9% |
| Strontium sulfide | SrS | 99.9% |
| Strontium titanate | SrTiO3 | 99.9% - 99.95% |
| Strontium zirconate | SrZrO3 | 99.9% |
| Sulfur | S | 99.9% |
| Tantalum | Ta | 99.9% - 99.99% |
| Tantalum carbide | TaC | 99.9% |
| Tantalum nitride | TaN | 99.5% |
| Tantalum pentoxide | Ta2O5 | 99.9% - 99.99% |
| Tantalum selenide | TaSe2 | 99.9% |
| Tantalum silicide | TaSi2 | 99.5% - 99.9% |
| Tellurium | Te | 99.9% - 99.999% |
| Tellurium oxide | TeO2 | 99.9% - 99.99% |
| Terbium | Tb | 99.9% |
| Terbium fluoride | TbF3 | 99.9% |
| Terbium fluoride oxide | TbOF | 99.9% |
| Terbium oxide | Tb4O7 | 99.9% - 99.95% |
| Tin | Sn | 99.9% - 99.999% |
| Tin (IV) fluoride | SnF2 | 99.9% |
| Tin oxide | SnO2 | 99.9% - 99.99% |
| Tin Sulfide | SnS2 | 99.9% |
| Tin telluride | SnTe | 99.9% - 99.99% |
| Titanium | Ti | 99.9% - 99.999% |
| Titanium aluminide | Ti3Al | 99.90% |
| Titanium boride | TiB2 | 99.50% |
| Titanium carbide | TiC | 99.9% |
| Titanium dioxide | TiO2 | 99.9% - 99.999% |
| Titanium fluoride | TiF3 | 99.90% |
| Titanium monoxide | TiO | 99.9% - 99.999% |
| Titanium nitride | TiN | 99.5% - 99.99% |
| Titanium oxide | Ti2O3 | 99.900% |
| Titanium selenide | TiSe2 | 99.9% - 99.99% |
| Titanium silicide | TiSi2 | 99.5% - 99.95% |
| Tungsten | W | 99.9% - 99.999% |
| Tungsten carbide | WC | 99.5% |
| Tungsten oxide | WO3 | 99.9% - 99.99% |
| Tungsten selenide | WSe2 | 99.9% |
| Tungsten silicide | WSi2 | 99.9% - 99.95% |
| Tungsten sulfide | WS2 | 99.9% |
| Tungsten telluride | WTe2 | 99.9% - 99.99% |
| Vanadium | V | 99.5% -99.9% |
| Vanadium carbide | VC | 99.5% |
| Vanadium dioxide | VO2 | 99.9% |
| Vanadium nitride | VN | 99.9% |
| Vanadium oxide | V2O3 | 99.9% |
| Vanadium pentoxide | V2O5 | 99.9% - 99.99% |
| Vanadium selenide | VSe2 | 99.9% |
| Vanadium sulfide | V2S3 | 99.9% |
| Ytterbium | Yb | 99.9% |
| Ytterbium fluoride | YbF3 | 99.95% |
| Ytterbium oxide | Yb2O3 | 99.9% - 99.99% |
| Yttrium | Y | 99.9% - 99.99% |
| Yttrium aluminum oxide | Y3Al5O12 | 99.9% |
| Yttrium ferrite | Y3Fe5O12 | 99.9% |
| Yttrium fluoride | YF3 | 99.9% - 99.99% |
| Yttrium oxide | Y2O3 | 99.9% - 99.99% |
| Zinc | Zn | 99.9% - 99.999% |
| Zinc fluoride | ZnF2 | 99.9% - 99.99% |
| Zinc nitride | Zn3N2 | 99.9% |
| Zinc oxide | ZnO | 99.9% - 99.999% |
| Zinc phosphide | Zn3P2 | 99.9% |
| Zinc selenide | ZnSe | 99.99% - 99.995 |
| Zinc sulfide | ZnS | 99.9% - 99.99% |
| Zinc telluride | ZnTe | 99.99% |
| Zirconium | Zr | 99.5% - 99.9 |
| Zirconium boride | ZrB2 | 99.5% |
| Zirconium carbide | ZrC | 99.5% |
| Zirconium chloride | ZrCl4 | 99.5% |
| Zirconium fluoride | ZrF4 | 99.9% |
| Zirconium nitride | ZrN | 99.9% |
| Zirconium oxide | ZrO2 | 99.5% - 99.9% |
| Zirconium silicide | ZrSi2 | 99.9% |
| Zirconium oxide/Yttrium oxide (YSZ) | ZrO2/Y2O3 | 99.90% |
| Metals | ||||
|---|---|---|---|---|
| Aluminium | Chromium | Lead | Platinum | Tantalum |
| Antimony | Cobalt | Lithium | Potassium | Tellurium |
| Barium | Gallium | Magnesium | Rhenium | Tin |
| Beryllium | Germanium | Manganese | Rhodium | Titanium |
| Bismuth | Gold | Molybdenum | Rubidium | Tungsten |
| Boron | Hafnium | Niobium | Ruthenium | Vanadium |
| Cadmium | Indium | Nickel | Selenium | Zinc |
| Calcium | Iridium | Osmium | Silicon | Zirkonium |
| Carbon | Iron | Palladium | Strontium | |
| Rare Earth | ||||
|---|---|---|---|---|
| Cerium | Gadolinium | Neodymium | Terbium | Various Rare |
| Dysprosium | Holmium | Praseodymium | Thulium | Earth alloys |
| Erbium | Lutetium | Samarium | Ytterbium | |
| Europium | Lanthanum | Scandium | Yttrium | |
| Alloys | ||||
|---|---|---|---|---|
| Al/B | Au/Pd | Co/Ni | Ge/Si | Pt/Ru |
| Al/Cu | Au/Pt | Co/Ta/Zr | Ge/Te | Pt/Ag |
| Al/Cu/Si | Au/Sn | Cr/SiO2Cermet | In/Sn | Sb/In |
| Al/Cr | Au/Zn | Cu/Al | Ir/Mn | Sb/In/Sn |
| Al/Li | Bi/Sb | Cu/Cr | Ni/Cr | Si/Al |
| Al/Mg | Bi/Sb/Se | Cu/Ga | Ni/Fe | Si/Cr |
| Al/Si | Bi/Sb/Se/Te | Cu/Ni | Ni/Ti | Ta/Ti |
| Al/Ti | Bi/Sb/Te | Cu/Sn | Ni/V | Ti/Al |
| Au/Sb | Bi/Se | Fe/Al/Si | Ni/Zr | Ti/W |
| Au/Ag | Bi/Te | Fe/Cr | Os/Ru | Ti/Zr |
| Au/B | Cd/Te | Fe/Mn | Pb/Se | W/Ti |
| Au/Be | So/Cr | Fe/Ru/Ga/Si | Pb/Te | Zn/Al |
| Au/Ge | Co/Fe | Fe/Si | Pb/Se/Te | Zr/Y |
| Au/Ir | Co/Nb/Zr | Fe/Si/B/C | Pd/Pt | and others |
| Oxides | ||||
|---|---|---|---|---|
| Al2O3 | CuO | PbZrO3 | Supercond. | Y2O3 |
| Sb2O3 | HfO2 unstab. | LiNbO3 | SrO | ZnO |
| BaTiO3 | HfO2/CaO | MgO | SrTiO3 | ZnO dop. |
| Bi2O3 | HfO2/Y2O3 | MoO3 | SrZrO3 | ZrO2 unstab. |
| Bi2TiO5 | In2O3 | Nb2O3 | Ta2O5 | ZrO2/CaO |
| Bi4Ti3O12 | ITO | Nb2O5 | ThO2 | ZrO2/Y2O3 |
| BiTiO3 | LaAlO3 | RE2O3 | SnO2 | |
| CeO2 | La2O3 | SiO2 | TiO2 | |
| CrO3 | PbTiO3 | SiO | WO3 | and others |
| Borides | ||||
|---|---|---|---|---|
| CrB2 | Mo2B6 | TiB2 | VB2 | |
| HfB2 | NbB2 | Wb | ZrB2 | |
| LaB6 | TaB2 | W2B | and others | |
| Carbides | ||||
|---|---|---|---|---|
| B4C | Mo2C | TaC | WC6%Co | ZrC |
| Cr3C2 | NbC | TiC | WC12%Co | |
| HfC | SiC | WC | VC | and others |
| Fluorides | ||||
|---|---|---|---|---|
| AlF3 | CeF3 | LiF | RE/NaF | YF3 |
| BaF2 | LaF3 | MgF2 | Na3AlF6 | |
| CaF2 | PbF2 | KF | ThF4 | and others |
| Nitrides | ||||
|---|---|---|---|---|
| AlN | HfN | Si3N4 | TiN | ZrN |
| BN | NbN | TaN | VN | and others |
| Silicides | ||||
|---|---|---|---|---|
| CrSi2 | MoSi2 | TaSi2 | Ti5Si3 | V3Si |
| Cr3Si | NbSi2 | Ta5Si3 | WSi2 | ZrSi2 |
| HfSi2 | PtSi | TiSi2 | VSi2 | and others |
| Sulfides, Selenides, Tellurides | ||||
|---|---|---|---|---|
| As2S3 | PbS | NbSe2 | TaTe2 | ZnS |
| CdSe | PbTe | Nb-S | WSe2 | ZnTe |
| CdSe | MoSe2 | NbTe2 | WsS2 | |
| CdTe | MoS2 | TaSe2 | WTe2 | |
| PbSe | MoTe2 | TaS2 | ZnSe | and others |
